Laser micromachining

Laser is good tool for micromachining because of its characteristics of noncontact, and precise machinability. Many laser processing such as cutting, drilling, annealing and surface modification were widely used for metal, ceramics and other materials. Especially, ultrafast laser, which have pulse length lees than hundreds of picosecond, have fine processing size and minimal heat affected zone, using nonlinear behavior generated by short pulse length and high peak power of ultrafast laser. Finding correlation between process parameters and machining, and optimization of process for fabricating high precision micro-sized structures without defects in case of using various lasers and materials has been studied for various applications and industry fields such as MEMS, micro fluidics, semiconductor, display, and etc. UV laser polymer projection machining was using photochemical effects to remove the polymer with certain shape. Selective removal of polymer, machining complex shape, and micro pillars were studied. Ultrafast laser was used to fabricate the hard-to-fabricate materials, serveral micron sized structures, or to machine the materials with minimal thermal effects. Selective machining of multi-thin-layers, whose thickness of each layer less than 1 μm, using femtosecond laser was conducted.

Polymer projection machining Selective machining of multi-thin-layer